MAGNETRON DESK SPUTTER COATER – DST1-300

Magnetron Sputter Coater model DST1-300 is a coating system with ability to coat semiconductors, dielectrics and metals (oxidizing and non-oxidizing). Uniform thin films with fine-grain sizes are formed in a fast cycle time. The large chamber DST1-300 with a 2, 3, or 4 inches magnetron, water-cooled cathode is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter.

The unlimited sputtering time makes it suitable for deposition of thick layers. The Single Target Coater is equipped with 600W DC power supply, 300 W RF power supply (optional) with auto matching box. The high vacuum system can deposit wide ranges of materials on different surfaces for thin film applications such as Micro & Nano electronic and SEM sample preparation.

Touch screen control with colorful display
The DST1-300 is equipped with a 7” colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current, and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.

Clean Vacuum
The vacuum chamber is Cylindrical Pyrex with 300 mm OD and 200 mm H. The DST1-300 is fitted with an internally mounted 90 l/s turbomolecular pump, backed by a two stage rotary pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.