RFGX00VT 13.56 MHz 300/600 Watts RF Plasma Generators
RFGX00VT 13.56 MHz 300/600 Watts RF Plasma Generators
The RFGX00VT includes a wide range of RF output power with 13.56 MHzfrequency. RFGX00VT made by VacTechniche is a combination of radiofrequency electronics achievements, accurate and repeatable output, advanced power amplifier protection, high safety factors, modular design and high efficiency power amplifier. These features have turned this product into a reliable device for industrial and laboratory applications.
Continuous operation capability
Due to use of high quality electronics
components and its optimal design
and high security margin, the system
can be used in heavy duty cycles.
Ease of operation and adjustment:
Through a graphical display-control
panel, user can monitor or control
parameter such as:
• Forward power,
• Reflected power,
• DC bias,
• Alarms and errors.
Ease of control and troubleshooting:
• Self-bias monitoring,
• Always showing the system state on
the display,
• Declaring the type of the produced
errors by means of embedded
alarming systems.
Safety
CE Immunity and Emission standard.
A complete set of Protections:
• Closed-loop output power control,
• Reflected power protection,
• Over temperature protection,
• Over current and overvoltage
protection,
• Reflected power limit protection.
Remote control capability
• Standard Digital (Modbus) and analog
control (0-5 V),
• Control: System on/off, Mode selection,
Forward power adjustment,
• Monitoring: Forward Power, Reflected
power.
Compressed Air-cooling(Fan) systems
DC to RF conversion efficiency more than
70%.
| RF Generator Specifications | ||||||
|---|---|---|---|---|---|---|
|
Model
|
RFG300VT
|
RFG600VT
|
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|
Output
power (W)
|
Adjustable 3W to 300 W (to a 50 Ω load)
|
Adjustable 3W to 600 W (to a 50 Ω load)
|
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|
Output frequency
|
13.56(MHz)
|
13.56(MHz)
|
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|
Output impedance
|
50(Ω) (resistance)
|
50(Ω) (resistance)
|
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|
Output connector
|
N type (male)
|
N type (male)
|
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|
Protection
|
Reflected power protection,
over temperature protection,
over current and overvoltage
protection and reflected
power limit protection.
|
Reflected power protection,
over temperature protection,
over current and overvoltage
protection and reflected
power limit protection.
|
||||
|
Reflect
Power limit
|
30-watt max. Reflect power limit is 30 watts
up to 60-watt forward power and decreases
automatically and linearly for higher power.
Therefore, the reflect power limit, is 10
watts in 300-watt forward power. This
additional protection option is for reducing
power loss and increasing the system life
time.
|
60-watt max. Reflect power limit is 60 watts
up to 120-watt forward power and
decreases automatically and linearly for
higher power. Therefore, the reflect power
limit, is 20 watts in 600-watt forward power.
This additional protection option is for
reducing power loss and increasing the
system life time.
|
||||
|
Display and
control panel
|
Graphic display and touch
screen control panel:
Forward power, reflected
power, User requested power,
self-bias monitoring and
Alarms and system state are
shown on the display.
|
Graphic display and touch
screen control panel:
Forward power, reflected
power, User requested power,
self-bias monitoring and
Alarms and system state are
shown on the display.
|
||||
|
Remote
control
|
Standard Digital (Modbus)
and analog control (0-5 V).
Control: System on/off, Mode
selection, Forward power
adjustment.
Monitoring: Forward Power,
Reflect powe
|
Standard Digital (Modbus)
and analog control (0-5 V).
Control: System on/off, Mode
selection, Forward power
adjustment.
Monitoring: Forward Power,
Reflect powe
|
||||
|
Operating
temperature
range
|
10 to 40 ℃
|
10 to 40 ℃
|
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|
Cooling
|
Air (fan)
|
Air (fan)
|
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|
Dimensions
(cm)
|
45×22×13.5 (length×width×height)
3U rack mountable
|
45×22×13.5 (length×width×height)
3U rack mountable
|
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|
Main input
power
|
220 V (190-240 V) & 50 Hz
(50-60 Hz)
|
220 V (190-240 V) & 50 Hz
(50-60 Hz)
|
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|
Weight
|
Less than 10kg
|
Less than 10kg
|
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|
Case material
|
Aluminum
|
Aluminum
|
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